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PLASMA LINE - Scalable Plasma Source

The Duo-Plasmaline is a direct microwave plasma source without using a magnetic field. In a simplified description, it works like an inverse luminescent tube excited by microwaves. The Duo-Plasmaline is operated at low pressure of about 1000 Pa down to 10 Pa, typically.

The microwave with a frequency of 2.45 GHz generated by two magnetrons is fed into the plasma line at both ends. A discharge ignites in the outer low pressure regime, with increasing microwave power the plasma grows from both ends along the tube, and an axially homogeneous plasma is formed.

A combination of such Duo-Plasmalines can be used to obtain a two dimensional plasma array. Single sources as well as 2, 4 and 8 parallel arranged Plasmalines are available for plasma assisted surface treatment like surface activating, etching and deposition.

Key Elements:

  • Low pressure microwave plasma source
  • Scalable and compact design
  • Large area applications
  • High plasma density
  • High efficiency
  • Low damage
  • Easy adaption to customized systems
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