OEM Equipment Repair and Refurbishment

Since our inception in 1997, GAE has been a key supplier of products and services relating to microwave heating equipment to high technology industries such as semiconductor manufacturing. Our expertise in microwave generators and waveguide components is well recognized by major OEMs through the services we provide for microwave equipment manufacturing, refurbishment, testing and calibration.

All repairs and refurbishments performed by GAE include a complete functional performance verification to original factory specifications, with comprehensive test data provided to the customer.  GAE maintains an inventory of magnetrons and other components used in magnetron heads to ensure the fastest possible delivery. And GAE provides the same warrantee on all repairs and refurbishments as provided to you by the original manufacturer. You can be assured of no change in your process, and the savings in maintenance costs you will realize are indeed significant!

OEM Generators and HV Power Supplies

Many of the microwave generators and power supplies used in GaSonics (now part of Novellus) etchers and ashers are among the "GL139" family of products made by ASTeX and it's former subsidiary AGL (ASTeX/Gerling Labs). GAE's background with these products allows us to provide ongoing service and support at a level that far exceeds the capabilities of ANY other company today. Services range from simple calibration and alignment to complete repair and refurbishment, with guaranteed performance and reliability

GAE also offers users of these products the capability to perform their own diagnostics to help determine the cause of failure and disposition the unit for repair. Once the failure cause is found, GAE can provide new and/or refurbished replacements for any part in any of the GL139 style units. See the section on Test Equipment under Instrumentation in the Products listing.

Magnetron Heads

A recent addition to our list of services is the repair and refurbishment of magnetron heads manufactured by ASTeX and its former subsidiary, ASTeX/Gerling Laboratories (AGL). These magnetron heads are used in wafer fab tools manufactured by Applied Materials, Lam Research and others. The photographs below illustrate the two most commonly used models

3.5 kW Magnetron Head
(ASTeX p/n D13449)

6 kW Magnetron Head
(ASTeX p/n D13614)